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Index
Contents
Preface
Chapter 1
Characterization of Polycrystalline Cu2ZnSn(SxSe1-X)4 Thin-Films and Solar Cells
Abstract
1. Introduction
2. Experimental
3. Structural Properties
4. Crystal Properties
5. Capacitance-Voltage Measurement
6. Defect Characterization
Conclusion
References
Biographical Sketch
Chapter 2
Semiconductor Materials Film Formation Process Assisted by an Acceleration Technique
Abstract
1. Introduction
Section 2. Chemical Vapor Deposition Using Monomethylsilane Gas at Room Temperature under Soft Plasma
2.1. Background
2.2. Reactor and Processes
2.3. Film Surface and Corrosion Resistance
2.4. Chemical Bonding
2.5. Cross Section and Content
2.6. On Stainless Steel and Polyimide
2.7. Silicon Oxide
2.8. Silicon Nitride
2.9. Decreasing Fluorine Contamination
Section 3. Surface and Gas Phase Reactions Induced in a Trichlorosilane-SiHx System for Silicon Film Deposition
3.1. Background
3.2. Reactor and Processes
3.3. Mass Spectra
3.4. Gas Concentrations and Byproduct Deposition
3.5. Chemical Reactions
Section 4. Summary
Acknowledgments
References
Chapter 3
Formation of Nanostructured Films of Polycrystalline Silicon Doped with Germanium
1Department of micro- and nanoelectronics, Belarusian State University of Informatics and Radioelectronics, Minsk, Republic of Belarus
Abstract
Introduction
Experimental Technique
Results and Discussion
Conclusion
References
Index
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